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BS EN ISO 14644-10:2022

BS EN ISO 14644-10:2022

$167.15

Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination

Published By Publication Date Number of Pages
BSI 2022 42
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This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

PDF Catalog

PDF Pages PDF Title
2 undefined
5 European foreword
Endorsement notice
9 Foreword
10 1 Scope
2 Normative references
3 Terms and definitions
11 4 Testing and grading surface chemical levels
4.1 Principles for testing the surface chemical contamination levels of clean surfaces in cleanrooms and controlled environments
4.2 ISO SCC descriptor format
13 4.3 ISO-SCC grade level
4.4 Converter for substances into surface atomic concentration
14 5 Measuring the cleanliness of surfaces for chemical contamination and demonstration of grade level compliance
5.1 Criteria for good cleanliness assessment
15 5.2 Documentation and reporting
5.2.1 Principle
5.2.2 Testing
5.2.3 Test report
17 Annex A (informative) Conversion between different unit expressions of surface concentration for chemical substances
24 Annex B (informative) Parameters influencing testing and interpretation of results
25 Annex C (informative) Essential considerations for a good cleanliness assessment
26 Annex D (informative) Methods for testing surface cleanliness for chemical concentration
38 Annex E (informative) Test record documentation
39 Bibliography

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BS EN ISO 14644-10:2022
$167.15