This document, in conjunction with ISO 21360\u20111, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those<\/p>\n
with mechanical or magnetic bearings;<\/p>\n<\/li>\n
with or without an additional drag stage(s) or other pumping stages on the shaft;<\/p>\n<\/li>\n
with one or more inlet ports.<\/p>\n<\/li>\n<\/ul>\n
Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance.<\/p>\n
The following completes the performance characteristics:<\/p>\n
information about throughputs and backing pressure of the turbomolecular vacuum pump;<\/p>\n<\/li>\n
the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).<\/p>\n<\/li>\n<\/ul>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 4 Symbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 5 Test methods 5.1 Test gas 5.2 Volume flow rate measurement (pumping speed) 5.2.1 General 5.2.2 Size of backing pump 5.2.3 Volume flow rate (pumping speed) measurement by the throughput method <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 5.2.4 Volume flow rate (pumping speed) measurement by the orifice method 5.3 Maximum throughput measurement 5.3.1 Measurement method 5.3.2 Test procedure 5.4 Critical backing pressure measurement 5.5 Measurement of compression ratio <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 5.6 Measurement of base pressure 5.7 Vibration measurement 5.7.1 General 5.7.2 Test apparatus 5.7.3 Test procedure 6 Test report <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | 6.1 Volume flow rate measurement 6.2 Compression ratio measurement 6.3 Maximum throughput measurement 6.4 Critical backing pressure measurement <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 6.5 Base pressure measurement 6.6 Vibrational measurement <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | Annex A (informative) Derivation of Formulae (4) and (5) <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Vacuum technology. Standard methods for measuring vacuum-pump performance – Turbomolecular vacuum pumps<\/b><\/p>\n |