UNE-EN 62047-10:2011
$19.50
Semiconductor devices – Micro-electromechanical devices – Part 10: Micro-pillar compression test for MEMS materials
| Published By | Publication Date | Number of Pages |
| AENOR | 2011-12-01 | 15 |
| Published Code | AENOR |
|---|---|
| Published By | Asociación Española de Normalización |
| Publication Date | 2011-12-01 |
| Pages Count | 15 |
| Language | English |
| File Size | 471.0 KB |
| ICS Codes | 31.080.99 - Other semiconductor devices |
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