ASTM-F1367:2003 Edition

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F1367-98(2003) Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Published By	Publication Date	Number of Pages
ASTM	2003	2

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Categories: 25.220.40 - Metallic coatings, ASTM

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Description

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

PDF Catalog

PDF Pages	PDF Title
1	Scope Referenced Documents Terminology Classification Ordering Information Chemical Composition Physical Properties Dimensions, Mass, and Permissible Variations Workmanship, Finish and Appearance TABLE 1
2	Sampling Analytical Methods Certification Product Marking Packaging and Package Marking Keywords TABLE 2

Additional information

Standard Title	F1367-98(2003) Standard Specification for Chromium Sputtering Targets for Thin Film Applications
Published Code	ASTM
Publication Date	2003
Pages Count	2
ICS Codes	25.220.40 - Metallic coatings

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ASTM-F1367:2003 Edition

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