IEC 62374:2007
$43.55
Semiconductor devices – Time dependent dielectric breakdown (TDDB) test for gate dielectric films
Published By | Publication Date | Number of Pages |
IEC | 2007-03-29 | 46 |
Provides a test method of Time Dependent Dielectric Breakdown
(TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure