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ASTM-E1127:2003 Edition

$40.63

E1127-03 Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Published By Publication Date Number of Pages
ASTM 2003 5
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1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

PDF Catalog

PDF Pages PDF Title
1 Scope
Referenced Documents
Terminology
Summary of Guide
Significance and Use
Ion Sputtering
2 Angle Lapping and Cross-Sectioning
3 Mechanical Cratering
Nondestructive Depth Profiling
FIG. 1
FIG. 2
4 Keywords
REFERENCES
ASTM-E1127
$40.63