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ASTM-E1127:2015 Edition

ASTM-E1127:2015 Edition

$40.63

E1127-08(2015) Standard Guide for Depth Profiling in Auger Electron Spectroscopy

Published By Publication Date Number of Pages
ASTM 2015 5
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ASTM E1127-08-Reapproved2015

Withdrawn Standard: Standard Guide for Depth Profiling in Auger Electron Spectroscopy (Withdrawn 2024)

ASTM E1127

Scope

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Keywords

angle lapping; angle-resolved AES; Auger electron spectroscopy; ball cratering; compositional depth profiling; cross sectioning; depth profiling; depth resolution; sputter depth profiling; sputtering; thin films;

ICS Code

ICS Number Code 71.040.50 (Physicochemical methods of analysis)

DOI: 10.1520/E1127-08R15

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