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ASTM-E1634:2011 Edition

ASTM-E1634:2011 Edition

$35.75

E1634-11 Standard Guide for Performing Sputter Crater Depth Measurements

Published By Publication Date Number of Pages
ASTM 2011 3
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1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

PDF Catalog

PDF Pages PDF Title
1 Scope
Referenced Documents
Terminology
Significance and Use
General Procedure
2 Interpretation of Results
Modified Procedure for Large-Area Craters
Precision and Accuracy
Keywords
FIG. 1
FIG. 2

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