ASTM-F154:2000 Edition

$44.96

F154-00 Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces

Published By	Publication Date	Number of Pages
ASTM	2000	13

Guaranteed Safe Checkout

Categories: 17.040.20 - Properties of surfaces, ASTM

If you have any questions, feel free to reach out to our online customer service team by clicking on the bottom right corner. We’re here to assist you 24/7.
Email:[email protected]

Description

ASTM F154-00

Historical Standard: Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces

ASTM F154

Scope

1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .

Keywords

contaminant; defects; dislocation; epitaxial; fracture; preferential etch; scratch; shallow pit; silicon; slip; stacking fault

ICS Code

ICS Number Code 17.040.20 (Properties of surfaces)

DOI: 10.1520/F0154-00

Additional information

Standard Title	F154-00 Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces
Published Code	ASTM
Publication Date	2000
Pages Count	13
ICS Codes	17.040.20 - Properties of surfaces