BS IEC 62047-32:2019
$102.76
Semiconductor devices. Micro-electromechanical devices – Test method for the nonlinear vibration of MEMS resonators
| Published By | Publication Date | Number of Pages |
| BSI | 2019 | 22 |
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | undefined |
| 4 | English CONTENTS |
| 5 | FOREWORD |
| 7 | 1 Scope 2 Normative references 3 Terms and definitions 4 Test parameters of nonlinear vibration of the resonators |
| 8 | 5 Test method for the amplitude-frequency response and phase-frequency response of the nonlinear vibration 5.1 Test system 5.2 Test conditions Figures Figure 1 – Test system |
| 9 | 5.3 Test procedures 6 Test method for the bending factor of the nonlinear vibrating frequency response 7 Test method for the amplitude threshold for the nonlinear jump |
| 10 | 8 Test method for the frequency deviation as a result of the nonlinear vibration 8.1 Frequency deviation of the self-excitation closed-loop system 8.2 Frequency deviation of the phase-locked closed-loop system Figure 2 – 3 dB bandwidth of the linear amplitude-frequency response |
| 11 | 8.3 Frequency deviation of the burst-excited system |
| 12 | Annex A (normative)Model of nonlinear vibration of MEMSresonators and bending factor A.1 Model of nonlinear vibration of MEMS resonators |
| 13 | A.2 Solution of the nonlinear vibration model A.3 Bending factor of the amplitude-frequency response |
| 14 | Figure A.1 – Typical amplitude-frequency response of the nonlinear vibration of the MEMS resonator |
| 15 | Figure A.2 – Change of the amplitude-frequency response with the bending factor |
| 16 | Annex B (informative)Nonlinear jump of the frequency response of MEMS resonators Figure B.1 – Jump phenomenon of the frequency response of a clamped-clamped MEMS bridge resonator |
| 17 | Figure B.2 – Three nonlinear amplitude-frequency responseswith various amplitude level |
| 18 | Annex C (normative)Frequency deviation of MEMS resonators in the closed-loop system C.1 Effect of the frequency deviation of the MEMS resonator on the accuracy of the resonant sensor C.2 Frequency deviation of the self-exciting closed-loop system C.3 Frequency deviation of the phase-locked closed-loop system |
| 20 | C.4 Oscillation frequency deviation of the burst-excited closed-loop system |
