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BSI 22/30449831 DC:2022 Edition

BSI 22/30449831 DC:2022 Edition

$13.70

BS ISO 21360-5. Vacuum technology. Standard methods for measuring vacuum-pump performance – Part 5. NEG vacuum pumps

Published By Publication Date Number of Pages
BSI 2022 34
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PDF Catalog

PDF Pages PDF Title
1 30449831-NC.pdf
3 ISO_DIS 21360-5 ed.1 – id.80496 Enquiry PDF (en) (1).pdf
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Symbols and abbreviated terms
12 5 Test methods
5.1 General
5.1.1 Test gases
5.1.2 Vacuum chamber
5.1.3 Orifice
13 5.1.4 Vacuum pumping system for rough pumping
5.1.5 Vacuum gauges
5.1.6 Temperature
5.1.7 Activation method of NEG
14 5.1.8 Procedure of sample installation and activation
5.2 Throughput method for small NEG samples
5.2.1 Experimental setup
16 5.2.2 Sample
5.2.3 Determination of getter pumping speed S and sorption quantity Cq
18 5.2.4 Determination of apparent sticking probability α
5.2.5 Measurement procedure
5.2.6 Measurement uncertainty
19 5.3 Throughput method with test dome
5.3.1 Experimental setup
20 5.3.2 Sample
21 5.3.3 Determination of getter pumping speed S and sorption quantity Cq
5.3.4 Determination of apparent sticking probability α
5.3.5 Measurement procedure
5.3.6 Measurement uncertainty
22 5.4 Transmission method for NEG coatings
5.4.1 Experimental setup
5.4.2 Sample
5.4.3 Determination of average getter pumping speed per unit area SA and sorption quantity Cq
24 5.4.4 Determination of apparent sticking probability α
5.4.5 Measurement procedure
5.4.6 Measurement uncertainty
25 5.5 Combination of transmission method and throughput method with test dome
26 6 Reporting
6.1 Small size of NEGs with the structure of pill, disk, ring, strip, module and cartridge
6.2 NEG pumps
27 6.3 NEG coatings
29 Annex€A (informative) Calculation method of the molecular conductance of orifice
30 Annex€B (informative) Example of diagrams for pumping characteristics of NEG
31 Annex C (informative) Typical value of initial apparent sticking probability α0 of NEG at room temperature.
33 Bibliography

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BSI 22/30449831 DC
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