This document gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.<\/p>\n
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9 and ISO 14644-10.<\/p>\n
The following matters of general guidance will be provided:<\/p>\n
expected surface cleanliness levels;<\/p>\n<\/li>\n
suitability of cleaning methods;<\/p>\n<\/li>\n
compatibility of surfaces with the cleaning technique;<\/p>\n<\/li>\n
assessment of cleaning appropriateness.<\/p>\n<\/li>\n<\/ul>\n
The following will be excluded from this document:<\/p>\n
classification of cleaning methods;<\/p>\n<\/li>\n
product produced within a cleanroom;<\/p>\n<\/li>\n
specific surface-related cleaning methods;<\/p>\n<\/li>\n
detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;<\/p>\n<\/li>\n
detailed material characteristics;<\/p>\n<\/li>\n
description of damage mechanisms by cleaning processes and time-dependent effects;<\/p>\n<\/li>\n
references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;<\/p>\n<\/li>\n
other characteristics of particles such as electrostatic charge, ionic charges, etc.;<\/p>\n<\/li>\n
chemical reactions between molecular contaminants and surfaces;<\/p>\n<\/li>\n
microbiological aspects of surface cleanliness;<\/p>\n<\/li>\n
radioactive aspects of contamination;<\/p>\n<\/li>\n
health and safety considerations;<\/p>\n<\/li>\n
environmental aspects such as waste disposal, emissions, etc.;<\/p>\n<\/li>\n
selection and use of statistical methods.<\/p>\n<\/li>\n<\/ul>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
| 5<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | 1 Scope <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 4 General methodology 4.1 Overview <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | 4.2 Methodology <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 5 Object description <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 6 Cleanliness specifications 7 Determination of initial contamination level 7.1 General 7.2 Determination of initial contamination level with respect to particle concentration 7.3 Determination of initial contamination level with respect to chemical concentration <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 8 Other requirements 9 Selection of a cleaning methodology 9.1 Selection procedure 9.2 Cleaning methodologies 9.2.1 Cleaning method 9.2.2 Categories of cleaning techniques <\/td>\n<\/tr>\n | ||||||
| 15<\/td>\n | 9.3 Cleaning process 10 Material compatibility check <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 11 Cleaning validation 11.1 General <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 11.2 Cleaning efficiency 11.2.1 Evaluation 11.2.2 Cleaning efficiency with respect to particle concentration <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 11.2.3 Cleaning efficiency with respect to chemical contamination <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 11.3 Cleaning appropriateness 11.3.1 Assessment 11.3.2 Cleaning appropriateness with respect to particle concentration <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 11.3.3 Cleaning appropriateness with respect to chemical concentration <\/td>\n<\/tr>\n | ||||||
| 21<\/td>\n | 12 Measurement methods 12.1 General 12.2 Direct measurement methods 12.2.1 General <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 12.2.2 Direct measurement methods with respect to SCP 12.2.3 Direct measurement methods with respect to SCC 12.3 Indirect measurement methods 12.3.1 General 12.3.2 Indirect measurement methods with respect to SCP <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 12.3.3 Indirect measurement methods with respect to SCC 13 Documentation <\/td>\n<\/tr>\n | ||||||
| 24<\/td>\n | Annex\u00a0A (informative) Aspects of cleaning <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | Annex\u00a0B (informative) Cleaning methods <\/td>\n<\/tr>\n | ||||||
| 33<\/td>\n | Annex\u00a0C (informative) Material compatibility with cleaning agents <\/td>\n<\/tr>\n | ||||||
| 35<\/td>\n | Annex\u00a0D (informative) Cleanliness measurement <\/td>\n<\/tr>\n | ||||||
| 40<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Cleanrooms and associated controlled environments – Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications<\/b><\/p>\n |