BS EN ISO 14644-8:2013
$167.15
Cleanrooms and associated controlled environments – Classification of air cleanliness by chemical concentration (ACC)
| Published By | Publication Date | Number of Pages |
| BSI | 2013 | 34 |
This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
This part of ISO 14644 currently considers only concentrations of air chemical contaminants between 100 and 10−12 g/m3 under cleanroom operational conditions.
This part of ISO 14644 is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.
It is not the intention of this part of ISO 14644 to describe the nature of air chemical contaminants.
This part of ISO 14644 does not give a classification of surface chemical contamination.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Introduction |
| 9 | Section sec_1 Section sec_2 Section sec_3 Section sec_3.1 1 Scope 2 Normative references 3 Terms and definitions 3.1 General |
| 10 | Section sec_3.2 3.2 Contaminant categories |
| 11 | Section sec_4 Section sec_4.1 Section sec_4.2 4 Classification 4.1 General 4.2 ISO-ACC descriptor format |
| 12 | Table tab_1 |
| 13 | Table tab_a Figure fig_1 Section sec_5 Section sec_5.1 Section sec_5.2 5 Demonstration of compliance 5.1 Principle 5.2 Testing |
| 14 | Section sec_5.3 5.3 Test report |
| 15 | Annex sec_A Annex sec_A.1 Annex sec_A.2 Annex sec_A.3 Annex sec_A.3.1 Annex A (informative) Parameters for consideration |
| 16 | Annex sec_A.3.2 Annex sec_A.3.3 Annex sec_A.3.4 Annex sec_A.4 Annex sec_A.4.1 Annex sec_A.4.2 Annex sec_A.4.3 Annex sec_A.4.4 Annex sec_A.5 Annex sec_A.5.1 Annex sec_A.5.2 Annex sec_A.5.3 Annex sec_A.5.4 |
| 17 | Annex sec_A.6 Annex sec_A.7 Annex sec_A.8 |
| 18 | Annex sec_A.9 |
| 19 | Annex sec_B Annex sec_B.1 Annex B (informative) Typical contaminants |
| 20 | Table tab_B.1 |
| 23 | Annex sec_C Annex sec_C.1 Annex sec_C.1.1 Annex sec_C.1.2 Annex sec_C.2 Annex sec_C.2.1 Annex sec_C.2.2 Annex sec_C.2.3 Annex sec_C.2.4 Annex sec_C.2.5 Annex sec_C.2.6 Annex C (informative) Typical methods of measurement |
| 24 | Annex sec_C.3 Annex sec_C.3.1 Annex sec_C.3.2 Annex sec_C.3.2.1 |
| 25 | Annex sec_C.3.2.2 |
| 26 | Table tab_C.1 |
| 27 | Annex sec_D Annex sec_D.1 Annex sec_D.1.1 Annex sec_D.1.2 Annex sec_D.2 Annex sec_D.2.1 Annex sec_D.2.2 Annex sec_D.2.3 Annex sec_D.2.4 Annex sec_D.2.5 Annex sec_D.2.6 Annex D (informative) Consideration of specific requirements for separative devices |
| 28 | Annex sec_D.2.7 |
| 29 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Reference ref_13 Reference ref_14 Reference ref_15 Reference ref_16 Reference ref_17 Reference ref_18 Reference ref_19 Reference ref_20 Bibliography |
| 30 | Reference ref_21 |
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ISO 14644-8:2013
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