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BSI PD ISO/TS 6737:2023

$142.49

Vacuum technology. Vacuum gauges. Characteristics for a stable ionisation vacuum gauge

Published By Publication Date Number of Pages
BSI 2023 24
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PDF Catalog

PDF Pages PDF Title
2 undefined
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Symbols and abbreviated terms
5 General description of the design
5.1 Components
11 5.2 Mode of operation
12 6 Specifications of the ionisation vacuum gauge
6.1 General specifications and requirements for the gauge head
13 6.2 Electrical equipment
14 7 Dimensions and potentials
7.1 General
15 7.2 Dimensions and tolerances
17 7.3 Potentials
7.4 Cathode
7.5 Anode cage
18 7.6 Gaps between electrodes
7.7 Electrode materials
7.8 Electrical feedthroughs
7.9 Surrounding tube (envelope) and flanges
7.10 Magnetic fields
19 8 Characteristics of the gauge (informative)
8.1 Sensitivity
8.2 Linearity
8.3 Electron transmission efficiency
8.4 Residual current and resolution
8.5 Repeatability
20 8.6 Reproducibility
8.7 Interference
8.8 Temperature of electrodes
8.9 Environmental conditions
9 Handling of and measurement with the gauge
9.1 Orientation of the gauge head
9.2 Environmental conditions
9.3 Conditioning of the gauge
9.4 Testing
21 9.5 Warm-up time
9.6 Sensitivity and calibration
9.7 Measurement
9.8 Transport
9.9 Cathode exchange
22 Annex A (Informative) Electron and ion trajectories of recommended gauge dimensions according to simulation
23 Bibliography
BSI PD ISO/TS 6737:2023
$142.49